Phase-shift imaging ellipsometer for measuring thin-film thickness.

Chih-Jen Yu Ching-Hung Hung Kuei-Chu Hsu Chien Chou

Published in: Microelectron. Reliab. (2015)

Keyphrases

phase shift
film thickness
refractive index
thin film
image processing
high resolution
imaging systems
image analysis
waveguide
electrical properties
computer vision
human faces
single view
white light interferometry