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Chih-Jen Yu
ORCID
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 1
Top Topics
Waveguide
Phase Shift
Film Thickness
Refractive Index
Top Venues
Microelectron. Reliab.
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Publications
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Chih-Jen Yu
,
Ching-Hung Hung
,
Kuei-Chu Hsu
,
Chien Chou
Phase-shift imaging ellipsometer for measuring thin-film thickness.
Microelectron. Reliab.
55 (2) (2015)