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Surface science issues in plasma etching.

Gottlieb S. OehrleinMarcus F. DoemlingBernd E. E. KastenmeierPeter J. MatsuoNeal R. RuegerMarc SchaepkensTheodorus E. F. M. Standaert
Published in: IBM J. Res. Dev. (1999)
Keyphrases
  • plasma etching
  • data sets
  • d objects
  • key issues
  • data mining
  • multiscale
  • free form
  • surface points
  • longitudinal study
  • low cost