Gottlieb S. Oehrlein

Publication Activity (10 Years)

Years Active: 1992-1999
Publications (10 Years): 0

Publications

Gottlieb S. Oehrlein, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert
Surface science issues in plasma etching. IBM J. Res. Dev. 43 (1) (1999)
Gottlieb S. Oehrlein, John F. Rembetski
Plasma-based dry etching techniques in the silicon integrated circuit technology. IBM J. Res. Dev. 36 (2) (1992)