Peter J. Matsuo

Publication Activity (10 Years)

Years Active: 1999-1999
Publications (10 Years): 0

Publications

Gottlieb S. Oehrlein, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert
Surface science issues in plasma etching. IBM J. Res. Dev. 43 (1) (1999)