Roughness and nanoholes in sol-gel thin films.

Andrea Antunes T. G. Amaral G. E. S. Brito Eduardo Abramof S. L. Morelhão

Published in: Microelectron. J. (2005)

Keyphrases

thin film
high density
multi layer
fractal dimension
solar cell
grain size
short circuit
surface roughness
database
spot detection
genetic algorithm
cost effective
low density
room temperature
subsurface scattering
film thickness