Thermo-mechanical characterization of passive stress sensors in Si interposer.
Benjamin ViannePierre BarVincent FioriSébastien Gallois-GarreignotKomi-Atchou EwuamePascal ChausseStephanie EscoubasNicolas HotellierOlivier ThomasPublished in: Microelectron. Reliab. (2015)