Interactive nano manipulator based on an atomic force microscope for scanning electron microscopy.
Masaki TakahashiHideyuki KoTatsuo UshikiFutoshi IwataPublished in: MHS (2011)
Keyphrases
- electron microscopy
- low energy
- x ray
- image stacks
- thin film
- force control
- microscopy images
- robotic manipulator
- robot manipulators
- virtual reality
- structured light
- visual inspection
- end effector
- robotic arm
- degrees of freedom
- contact force
- laser scanning
- path planning
- user interaction
- inverse kinematics
- wireless sensor networks
- computer controlled
- force feedback
- nano scale
- fine grained