A low energy FIB processing, repair, and test system.

Katsuyoshi Miura Tomoyuki Kobatake Koji Nakamae Hiromu Fujioka

Published in: Microelectron. Reliab. (2003)

Keyphrases

low energy
electron microscopy
minimum energy
real time
protein folding
data management
data processing
cost effective
high level
data analysis
context aware
fine grained