Sign in

Data-Based Switching Feedforward Control for Repeating and Varying Tasks: With Application to an Ultraprecision Wafer Stage.

Min LiYu ZhuKaiming YangLaihao YangChuxiong Hu
Published in: IEEE Trans. Ind. Electron. (2019)
Keyphrases
  • feed forward
  • data sets
  • data analysis
  • artificial neural networks
  • data collection
  • database
  • real time
  • data acquisition
  • neural network
  • genetic algorithm
  • data sources
  • data points
  • input data
  • recurrent neural networks