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Electrolessly deposited diffusion barriers for microelectronics.
Eugene J. O'Sullivan
Alejandro G. Schrott
Milan Paunovic
Carlos J. Sambucetti
Jeffrey R. Marino
Philip J. Bailey
Suryanarayana Kaja
Krystyna W. Semkow
Published in:
IBM J. Res. Dev. (1998)
Keyphrases
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electron microscopy
x ray
low energy
diffusion process
thin film
anisotropic diffusion
high power
high density
diffusion model
nonlinear diffusion
diffusion equation
diffusion mri
diffusion processes
electron beam
information systems
low cost
information technology