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Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning.

Shao-Yun FangYi-Shu TaiYao-Wen Chang
Published in: ASP-DAC (2015)
Keyphrases
  • decomposition method
  • neural network
  • decomposition methods
  • data structure
  • transmission line
  • decomposition algorithm
  • databases
  • feature selection
  • wavelet packet
  • grain size
  • high temperature