Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning.

Shao-Yun Fang Yi-Shu Tai Yao-Wen Chang

Published in: ASP-DAC (2015)

Keyphrases

decomposition method
neural network
decomposition methods
data structure
transmission line
decomposition algorithm
databases
feature selection
wavelet packet
grain size
high temperature