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Flexible Packed Stencil Design With Multiple Shaping Apertures and Overlapping Shots for E-beam Lithography.
Chris C. N. Chu
Wai-Kei Mak
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2015)
Keyphrases
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real time
electron beam
case study
lightweight
highly flexible
information systems
multimedia
image sequences
design principles
engineering design
design decisions