Silicon oxynitride integrated waveguide for on-chip optical interconnects applications.
C. K. WongHei WongMansun ChanY. T. ChowH. P. ChanPublished in: Microelectron. Reliab. (2008)
Keyphrases
- waveguide
- electro optic
- cmos technology
- high speed
- high density
- low cost
- high data rate
- antenna array
- input output
- low power
- automatic target recognition
- fiber optic
- power dissipation
- analog vlsi
- power consumption
- single chip
- wireless networks
- vlsi implementation
- infrared
- transmission electron microscopy
- dielectric constant
- real time