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Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures.

Junpei SakuraiSeiichi Hata
Published in: Int. J. Autom. Technol. (2015)
Keyphrases
  • thin film
  • room temperature
  • high density
  • multi layer
  • short circuit
  • grain size
  • shape model
  • electron microscopy
  • expert systems
  • white light interferometry
  • databases
  • mathematical model