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Directional Repetitive Control of a Metrological AFM.
Roel J. E. Merry
Michael J. C. Ronde
René van de Molengraft
Richard K. Koops
Maarten Steinbuch
Published in:
IEEE Trans. Control. Syst. Technol. (2011)
Keyphrases
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control system
control strategy
data sets
knowledge base
multiscale
optimal solution
control method
control problems
genetic algorithm
computer vision
information systems
optimal control
control strategies
control theory
atomic force microscopy