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Fabrication of carbon nanotube arrays for field emission and sensor devices by nanoimprint lithography.
Lei Yin
Hongzhong Liu
Yucheng Ding
Hongbo Lan
Bingheng Lu
Published in:
Microelectron. J. (2009)
Keyphrases
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carbon nanotubes
electron beam
high density
sensor networks
sensor data
electron beam lithography
neural network
mobile devices
high speed
multi sensor
semiconductor devices
greenhouse gas emissions
real time
energy consumption
low cost