Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy.
Vic De RidderBappaditya DeyVíctor BlancoSandip HalderBartel Van WaeyenbergePublished in: CoRR (2023)
Keyphrases
- classification method
- defect detection
- knn
- k nearest neighbor
- support vector machine
- classification algorithm
- support vector machine svm
- classification scheme
- text classification
- feature extraction
- bayesian networks
- automated visual inspection
- integrated circuit
- clustering algorithm
- network structure
- support vector
- text categorization
- training set
- selected features
- information retrieval
- data sets