High Performance Electron Beam Tester for Voltage Measurement on Unpassivated and Passivated Devices.
Yasuo TokunagaJürgen FrosienPublished in: ITC (1989)
Keyphrases
- electron beam
- semiconductor devices
- field effect transistors
- x ray
- integrated circuit
- power system
- design parameters
- mobile devices
- high efficiency
- steady state
- black box
- low power consumption
- electric field
- case study
- high voltage
- low voltage
- simulated annealing
- power supply
- transmission line
- high density
- knowledge base
- cost effective
- mathematical model