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A two-dimensional silicon-on-glass actuator with dispensed polymer microlens.
Pei Li
Long-Fa Pan
Hans Zappe
Published in:
NEMS (2013)
Keyphrases
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si sio
three dimensional
space charge
low cost
control system
high speed
closed loop
high density
machine learning
multiscale
metal oxide
databases
data mining
multi dimensional
room temperature
working principle