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Layout decomposition for double patterning lithography.
Andrew B. Kahng
Chul-Hong Park
Xu Xu
Hailong Yao
Published in:
ICCAD (2008)
Keyphrases
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database
information systems
wide range
image processing
integrated circuit
decomposition method
decomposition methods
electron beam
data sets
neural network
computer vision
user interface
wavelet packet
decomposition algorithm
image decomposition