Layout decomposition for double patterning lithography.

Andrew B. Kahng Chul-Hong Park Xu Xu Hailong Yao

Published in: ICCAD (2008)

Keyphrases

database
information systems
wide range
image processing
integrated circuit
decomposition method
decomposition methods
electron beam
data sets
neural network
computer vision
user interface
wavelet packet
decomposition algorithm
image decomposition