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Auger electron spectroscopy characterization of Ti/NiV/Ag multilayer back-metal for monitoring of Ni migration on Ag surface.

R. RicciariE. P. FerlitoG. PizzoM. PadalinoG. AnastasiM. SacchiG. PappalardoC. ConsalvoDomenico Mello
Published in: Microelectron. Reliab. (2015)
Keyphrases
  • electron microscopy
  • low energy
  • x ray
  • thin film
  • three dimensional
  • monitoring system
  • real time
  • electron microscope
  • silicon nitride
  • range data
  • early warning
  • grain size
  • data sets
  • surface registration