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Fabrication of 128×128 element optical switch array by micromachining technology.
S. B. Wang
S. B. Zhou
G. Huang
B. F. Xiong
S. H. Chen
X. J. Yi
Published in:
Microprocess. Microsystems (2005)
Keyphrases
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high speed
electron beam
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rapid development
high density
integrated circuit
data sets
information systems
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key technologies
data mining
st century
technological advances
fiber optic