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Electric field-enhanced metal-induced lateral crystallization and P-channel poly-Si TFTs fabricated by it.
Xiangbin Zeng
Huijuan Wang
Xiaowei Sun
Junfeng Li
Published in:
Microelectron. J. (2008)
Keyphrases
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thin film
solar cell
grain size
chemical vapor deposition
electric field
film thickness
high density
field effect transistors
high speed
space charge
multi channel
image acquisition
multi layer
neural network
low density
mathematical analysis
real time