Electron beam lithography for advanced LSl fabrication.

Eiichi Goto Takashi Soma Masanori Idesawa Tateaki Sasaki

Published in: AFIPS National Computer Conference (1978)

Keyphrases

electron beam lithography
electron beam
linear projection
x ray
methods outperform
sparse coding
data sets
neural network
machine learning
case study
computer aided
cluster analysis
high density