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Parameter extraction method for universal amorphous silicon thin-film transistors simulation program with integrated circuit emphasis model.

Jong Woo JinMaher OudwanDmitri DainekaOumkelthoum MoustaphaYvan Bonnassieux
Published in: IET Circuits Devices Syst. (2012)
Keyphrases
  • integrated circuit
  • thin film
  • simulation model
  • high density
  • low cost
  • decision support system
  • electron microscopy
  • plasma etching