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Mixed-type wafer defect detection based on multi-branch feature enhanced residual module.

Shouhong ChenZhentao HuangTao WangXingna HouJun Ma
Published in: Expert Syst. Appl. (2024)
Keyphrases
  • defect detection
  • feature extraction
  • bi level
  • automated visual inspection
  • feature set
  • database
  • databases
  • genetic algorithm
  • feature vectors
  • artificial intelligence
  • optimal solution