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An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness.

Matthias JägerJürgen BrunsJessica SchneidewindCay PinnowHassan GargouriKlaus Petermann
Published in: Sensors (2021)
Keyphrases
  • refractive index
  • film thickness
  • sensor data
  • multi layer
  • image processing
  • photometric stereo
  • surface normals
  • single view
  • zenith angle
  • computer vision
  • multiscale
  • active learning