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Scanning heterodyne interferometer setup for the time-resolved thermal and free-carrier mapping in semiconductor devices.

Martin LitzenbergerChristoph FurböckSergey BychikhinDionyz PoganyErich Gornik
Published in: IEEE Trans. Instrum. Meas. (2005)
Keyphrases
  • semiconductor devices
  • electron beam
  • infrared
  • data sets
  • ontology mapping
  • finite element analysis