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Accuracy Analysis of Dynamic-Wafer-Handling Robotic System in Semiconductor Manufacturing.

Hongtai ChengHeping ChenBenjamin W. Mooring
Published in: IEEE Trans. Ind. Electron. (2014)
Keyphrases
  • semiconductor manufacturing
  • robotic systems
  • high accuracy
  • process control
  • production system
  • cognitive architecture
  • fuzzy logic
  • vision system
  • dynamic environments
  • autonomous robots