Fabrication of ring-shaped silicon resonator using (2, 1) in-plane resonance mode.

Kenta Suzuki Kumiko Ioka Yasushiro Nishioka

Published in: NEMS (2011)

Keyphrases

high density
plasma etching
high speed
semiconductor devices
integrated circuit
three dimensional
low density
silicon on insulator
low cost
ground plane
electron beam
data center