Beyond Performance/Cost Tradeoffs in Motion Control: A Multirate Feedforward Design With Application to a Dual-Stage Wafer System.
Jurgen van ZundertTom OomenJan VerhaeghWouter H. T. M. AangenentDuarte J. AntunesW. P. M. H. HeemelsPublished in: IEEE Trans. Control. Syst. Technol. (2020)