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Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models.
Yumeng Shi
Yu Cai
Shunyuan Lou
Yining Chen
Published in:
Appl. Intell. (2024)
Keyphrases
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prediction model
integrated circuit
electrical properties
artificial neural networks
wavelet transform
high speed
x ray
prediction accuracy
film thickness
neural network
probabilistic model
high density
predictive model