Shunyuan Lou

Publication Activity (10 Years)

Years Active: 2024-2024
Publications (10 Years): 1

Top Topics

Predictive Model

Electrical Properties

Wavelet Transform

Top Venues

Publications

Yumeng Shi, Yu Cai, Shunyuan Lou, Yining Chen
Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models. Appl. Intell. 54 (1) (2024)