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Closed-Loop Control of Droplet Transfer in Electron-Beam Freeform Fabrication.
Shuhe Chang
Haoyu Zhang
Haiying Xu
Xinghua Sang
Li Wang
Dong Du
Baohua Chang
Published in:
Sensors (2020)
Keyphrases
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electron beam
free form
integrated circuit
x ray
semiconductor devices
design parameters
complex scenes
electron beam lithography
transfer learning
three dimensional
search algorithm
expert systems
knowledge transfer