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Precise visual inspection for LSI wafer patterns using subpixel image alignment.
Takashi Hiroi
Shunji Maeda
Hitoshi Kubota
Kenji Watanabe
Yasuo Nakagawa
Published in:
WACV (1994)
Keyphrases
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visual inspection
image alignment
registration accuracy
phase correlation
image analysis
image registration
inverse compositional
active appearance models
lucas kanade
optical flow
medical imaging
moving objects