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Spline regression based feature extraction for semiconductor process fault detection using support vector machine.
Jonghyuck Park
Ick-Hyun Kwon
Sung-Shick Kim
Jun-Geol Baek
Published in:
Expert Syst. Appl. (2011)
Keyphrases
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fault detection
industrial processes
feature extraction
support vector machine
feature vectors
fault diagnosis
power plant
feature space
support vector machine svm
management system
tennessee eastman
quality improvement
fuzzy logic
real time
pattern recognition
training data
face recognition
data mining