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Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films.

Martin FischenederMartin OposichMichael SchneiderUlrich Schmid
Published in: Sensors (2018)
Keyphrases
  • thin film
  • high density
  • grain size
  • short circuit
  • multi layer
  • plasma etching
  • neural network
  • room temperature
  • solar cell
  • genetic algorithm
  • artificial neural networks
  • low cost
  • high voltage