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Forward-stepwise regression analysis for fine leak batch testing of wafer-level hermetic MEMS packages.
Changsoo Jang
Byeng Dong Youn
Ping F. Wang
Bongtae Han
Suk-Jin Ham
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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regression analysis
regression model
statistical tests
linear regression model
correlation analysis
factor analysis
independent variables
wafer fabrication
explanatory variables
linear regression models
interval valued data
real world
data mining
low dimensional
test cases
integrated circuit