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Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control.

Chek Sing TeoKok Kiong TanSer Yong Lim
Published in: IEEE Trans. Instrum. Meas. (2008)
Keyphrases
  • iterative learning control
  • dynamic environments
  • real time
  • intelligent control
  • neural network
  • feature selection
  • significant improvement
  • iterative learning