Fabrication and performance of Microplasma Reactor for maskless scanning plasma etching.

Qiuping Zhang Li Wen Weiwei Xiang Jiaru Chu

Published in: NEMS (2010)

Keyphrases

plasma etching
low density
thin film
high density
scan data
nuclear power plant
structured light
image processing
expert systems
fuzzy neural network
dissolved oxygen
real world
multiscale
fuzzy logic
input output
control method