Removal of 5nm contaminant particles using a supersonic CO2 particle beam.
Jin W. LeeMin K. ChoIn H. KimPublished in: NEMS (2017)
Keyphrases
- opposition based learning
- proposal distribution
- cauchy mutation
- electron beam lithography
- particle swarm optimization
- standard particle swarm optimization
- differential evolution
- swarm optimization
- cross section
- information systems
- air force
- particle swarm
- particle filter
- evolutionary algorithm
- particle filtering
- light scattering
- feature tracking
- electron beam
- nasa langley research center
- density function
- swarm intelligence
- fitness values
- united states
- learning algorithm