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Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography.
Yunfeng Yang
Wai-Shing Luk
David Z. Pan
Hai Zhou
Changhao Yan
Dian Zhou
Xuan Zeng
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2016)
Keyphrases
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optimization algorithm
databases
optimization problems
database
optimization process
global optimization
electron beam
discrete optimization
decomposition method
cross section
evolution strategy
evolutionary algorithm
three dimensional
case study
computer vision
genetic algorithm
real time