Fabrication Techniques for Improving the Performance of PVDF-on-Silicon Ultrasonic Transducer Arrays.

Hyun-Joong Kim Babak Ziaie

Published in: EMBC (2006)

Keyphrases

high density
high speed
semiconductor devices
low cost
plasma etching
real world
image sequences
integrated circuit
silicon on insulator
clustering algorithm
multiscale
electrical properties