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Further Investigation on Mechanism of Trap Level Modulation in Silicon Nitride Films by Fluorine Incorporation.

Harumi SekiYasushi NakasakiYuichiro Mitani
Published in: IRPS (2020)
Keyphrases
  • levels of abstraction
  • data mining
  • information systems
  • higher level
  • selection mechanism
  • databases
  • neural network
  • genetic algorithm
  • knowledge base
  • electrical properties