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Job scheduling of diffusion furnaces in semiconductor fabrication facilities.

Kan WuEdward HuangMengchang WangMeimei Zheng
Published in: Eur. J. Oper. Res. (2022)
Keyphrases
  • job scheduling
  • plasma etching
  • semiconductor devices
  • grid environment
  • high density
  • resource allocation
  • load balancing
  • electron beam lithography
  • database
  • multi agent
  • scheduling problem
  • high speed