Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology.
Xiang-meng JingDi ChenDong-ming FangChuang HuangJing-Quan LiuXiang ChenPublished in: Microelectron. J. (2007)
Keyphrases
- multi layer
- high density
- silicon on insulator
- neural network
- high speed
- neural nets
- multiple layers
- plasma etching
- feed forward neural networks
- single layer
- error back propagation
- thin film
- field effect transistors
- feature selection
- web intelligence
- image features
- active learning
- multiscale
- semiconductor devices
- information retrieval