Autocorrelation of Cycle Times in Semiconductor Manufacturing Systems.
Alexander K. SchömigManfred MittlerPublished in: WSC (1995)
Keyphrases
- manufacturing systems
- flexible manufacturing systems
- manufacturing environment
- petri net
- manufacturing processes
- higher order
- quality control
- complex systems
- shop floor
- holonic manufacturing systems
- manufacturing process
- control structure
- semiconductor manufacturing
- manufacturing cell
- manufacturing enterprises
- deadlock detection
- production line
- information content
- real time