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FDSOI bottom MOSFETs stability versus top transistor thermal budget featuring 3D monolithic integration.

Claire Fenouillet-BérangerBernard PrevitaliPerrine BatudeF. NemouchiMikaël CasséXavier GarrosL. TostiNils RambalDominique LafondH. DansasL. PasiniLaurent BrunetFabien DepratM. GregoireM. MellierMaud Vinet
Published in: ESSDERC (2014)
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