Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
Uwe BrandMin XuLutz DoeringJannick Langfahl-KlabesHeinrich BehleSebastian BütefischThomas AhbeErwin PeinerStefan VöllmekeThomas FrankBodo MickanIlia KiselevMichael HauptmannlMichael DrexelPublished in: Sensors (2019)